18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
Contents
- 1 EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Unanswered Questions
- 1.11 Original Abstract Submitted
EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME
Organization Name
Inventor(s)
EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 18136070 titled 'EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME
Simplified Explanation
The abstract describes an edge ring with protrusions on the inner side surface of the ring body, spaced apart in the circumference direction, where the distance between the axis and points on the inner side surface varies.
- The edge ring includes a ring body with protrusions on the inner side surface.
- Protrusions are spaced apart in the circumference direction.
- The distance between the axis and points on the inner side surface varies.
Potential Applications
The edge ring innovation could be applied in:
- Semiconductor manufacturing
- Optical equipment
- Precision engineering
Problems Solved
This technology solves issues related to:
- Precision alignment
- Control of light reflection
- Mechanical stability
Benefits
The benefits of this technology include:
- Improved performance in precision applications
- Enhanced control over light reflection
- Increased mechanical stability
Potential Commercial Applications
The edge ring technology could be utilized in:
- Semiconductor lithography equipment
- Optical instruments
- High-precision machinery
Possible Prior Art
One possible prior art could be:
- Edge rings with fixed protrusions at regular intervals.
Unanswered Questions
How does the edge ring design impact manufacturing costs?
The abstract does not provide information on the cost implications of this technology.
Are there any limitations to the size or shape of the edge ring?
The abstract does not address any restrictions on the size or shape of the edge ring.
Original Abstract Submitted
An edge ring includes a ring body having an axis parallel to a first direction; and a plurality of protrusions provided at an inner side surface of the ring body and protruding toward the axis, the plurality of protrusions being spaced apart from each other in a circumference direction of the edge ring, wherein a first distance between the axis and a first point on the inner side surface of the ring body between two adjacent protrusions of the plurality of protrusions is larger than a second distance between the axis and a second point on the inner side surface of the ring body at which a protrusion of the plurality of protrusions is provided.
