18131939. SUSCEPTOR FOR PROCESS CHAMBER simplified abstract (Applied Materials, Inc.)
Contents
SUSCEPTOR FOR PROCESS CHAMBER
Organization Name
Inventor(s)
Zhepeng Cong of San Jose CA (US)
Nimrod Smith of Cupertino CA (US)
Zuoming Zhu of Sunnyvale CA (US)
Surendra Singh Srivastava of Santa Clara CA (US)
SUSCEPTOR FOR PROCESS CHAMBER - A simplified explanation of the abstract
This abstract first appeared for US patent application 18131939 titled 'SUSCEPTOR FOR PROCESS CHAMBER
The patent application describes a substrate support assembly with a susceptor assembly and lift pins for semiconductor processing equipment.
- The susceptor assembly includes an inner body, an outer rim, and recessed portions.
- An outer portion with an inner ledge surrounds the inner portion of the susceptor assembly.
- Lift pins are positioned under the recessed portions of the inner body to support the substrate.
Potential Applications:
- Semiconductor manufacturing processes
- Thin film deposition
- Wafer processing in the electronics industry
Problems Solved:
- Ensures uniform heating of the substrate
- Facilitates efficient processing of semiconductor wafers
- Enhances overall equipment performance
Benefits:
- Improved thermal management
- Enhanced process control
- Increased yield and quality of semiconductor devices
Commercial Applications:
- Semiconductor fabrication facilities
- Research and development labs in the electronics industry
- Equipment manufacturers for semiconductor processing
Questions about the technology: 1. How does the susceptor assembly contribute to the efficiency of semiconductor processing?
- The susceptor assembly ensures uniform heating of the substrate, leading to improved process control and higher quality output.
2. What role do lift pins play in the substrate support assembly?
- Lift pins support the substrate by being positioned under the recessed portions of the susceptor assembly, aiding in the processing of semiconductor wafers.
Original Abstract Submitted
A substrate support assembly is provided including: a susceptor assembly that includes an inner portion having an inner body, an outer rim disposed around the inner body, and a plurality of recessed portions, each recessed portion recessed relative to a lower surface of the inner body; and an outer portion positioned around the inner portion, the outer portion including an inner ledge. The outer rim of the inner portion is positioned on the inner ledge of the outer portion; and a first plurality of lift pins. Each lift pin of the first plurality of lift pins underlies one of the recessed portions of the inner portion of the susceptor assembly.
