18090174. METHOD AND DEVICE FOR DETERMINING COORDINATES OF CONTACT THROUGH-HOLES IN MEMORY DEVICE simplified abstract (Yangtze Memory Technologies Co., Ltd.)

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METHOD AND DEVICE FOR DETERMINING COORDINATES OF CONTACT THROUGH-HOLES IN MEMORY DEVICE

Organization Name

Yangtze Memory Technologies Co., Ltd.

Inventor(s)

Wenqi Wang of Wuhan (CN)

Guangdian Chen of Wuhan (CN)

Jinxing Chen of Wuhan (CN)

Yanli Wang of Wuhan (CN)

Zongliang Huo of Wuhan (CN)

METHOD AND DEVICE FOR DETERMINING COORDINATES OF CONTACT THROUGH-HOLES IN MEMORY DEVICE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18090174 titled 'METHOD AND DEVICE FOR DETERMINING COORDINATES OF CONTACT THROUGH-HOLES IN MEMORY DEVICE

Simplified Explanation

The patent application describes a method for determining the coordinates of contact through-holes (CTs) in a memory device using image processing techniques.

  • Obtaining a bright voltage contrast (BVC) image with CTs in the memory device.
  • Converting color components in the BVC image into grayscale values to obtain a grayscale BVC image.
  • Performing a dilation process on the grayscale BVC image to obtain a dilated grayscale BVC image.
  • Calculating a first threshold for the dilated grayscale BVC image and determining if it meets a pre-determined value.
  • Performing a first image process to obtain coordinates of each CT if the threshold is met, otherwise performing a second image process.

Potential Applications

This technology can be applied in the semiconductor industry for quality control and inspection of memory devices.

Problems Solved

This technology solves the problem of accurately determining the coordinates of contact through-holes in memory devices, which is crucial for ensuring proper functionality.

Benefits

The benefits of this technology include improved accuracy and efficiency in identifying CTs, leading to enhanced quality control processes in memory device manufacturing.

Potential Commercial Applications

One potential commercial application of this technology is in semiconductor manufacturing companies that produce memory devices, where it can streamline the inspection process and improve overall product quality.

Possible Prior Art

Prior art in this field may include similar image processing techniques used for defect detection in semiconductor devices, but specific methods for determining CT coordinates may be novel.

What are the specific pre-determined values used in the threshold calculation process?

The specific pre-determined values used in the threshold calculation process are not mentioned in the abstract. Further details on these values would provide insight into the sensitivity and accuracy of the method.

How does the first and second image process differ in terms of identifying the coordinates of CTs?

The abstract mentions that a first image process is performed when the threshold is met, while a second image process is performed when the threshold is not met. Understanding the differences in these processes and how they affect the accuracy of CT coordinate identification would be valuable information.


Original Abstract Submitted

A method of determining coordinates of contact through-holes (CTs) in a memory device includes: obtaining a bright voltage contrast (BVC) image including a plurality of CTs in the memory device; converting color components in the BVC image into grayscale values to obtain a grayscale BVC image; performing a dilation process on the grayscale BVC image to obtain a dilated grayscale BVC image; calculating a first threshold for the dilated grayscale BVC image and determining whether the first threshold is greater than or equal to a pre-determined value; in response to the first threshold being greater than or equal to the pre-determined value, performing a first image process on the dilated grayscale BVC image to obtain coordinates of each CT; and in response to the first threshold being smaller than the pre-determined value, performing a second image process on the dilated grayscale BVC image to obtain the coordinates of each CT.