18070010. GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING simplified abstract (Applied Materials, Inc.)
Contents
- 1 GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Unanswered Questions
- 1.11 Original Abstract Submitted
GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING
Organization Name
Inventor(s)
Mukhles Sowwan of Sunnyvale CA (US)
Shu-Kwan Lau of Sunnyvale CA (US)
GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING - A simplified explanation of the abstract
This abstract first appeared for US patent application 18070010 titled 'GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING
Simplified Explanation
The present disclosure relates to gas recycling systems, substrate processing systems, and related apparatus and methods for semiconductor manufacturing.
- Gas recycling system for semiconductor manufacturing
- Pump connected to processing chamber outlet passages
- Filtration devices remove impurities from the gas
- Filtered gas flows to gas supply system
Potential Applications
This technology can be applied in semiconductor manufacturing processes where unreacted gases need to be recycled and reused multiple times to improve efficiency and reduce waste.
Problems Solved
1. Reduction of gas waste in semiconductor manufacturing processes 2. Improved efficiency by recycling unreacted gases
Benefits
1. Cost savings by reusing gases multiple times 2. Environmental benefits by reducing gas emissions 3. Enhanced process control and consistency in semiconductor manufacturing
Potential Commercial Applications
Optimizing gas usage in semiconductor manufacturing processes
Possible Prior Art
One possible prior art could be gas recycling systems used in other industrial processes such as chemical manufacturing.
Unanswered Questions
1. How does the gas recycling system handle different types of gases with varying impurities? 2. What is the impact of using recycled gases on the quality of semiconductor products?
Original Abstract Submitted
The present disclosure generally relates to gas recycling systems, substrate processing systems, and related apparatus and methods for semiconductor manufacturing. In one or more implementations, unreacted gases from chambers can be used, recycled, and used one or more additional times. In one implementation, a gas recycling system includes a pump configured to fluidly connect to one or more outlet passages of a processing chamber to exhaust a gas from the processing chamber. The system includes one or more filtration devices in fluid communication with the pump such that the gas flows from the pump to the one or more filtration devices. The one or more filtration devices are configured to remove one or more impurities from the gas. The system includes a gas supply system in fluid communication with the one or more filtration devices such that the filtered gas flows to the gas supply system.
