18034831. THICKNESS MEASUREMENT DEVICE simplified abstract (LG ELECTRONICS INC.)
Contents
THICKNESS MEASUREMENT DEVICE
Organization Name
Inventor(s)
THICKNESS MEASUREMENT DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 18034831 titled 'THICKNESS MEASUREMENT DEVICE
Simplified Explanation
The patent application describes a thickness measurement device that consists of a stage module, an upper optical module, and a lower optical module. The stage module is larger in size than the upper and lower optical modules and can move along the Y-axis. The device also includes a measurement specimen placement part, a specimen mounting part, and a specimen mounting part movement mechanism.
- The device includes a stage module, upper optical module, and lower optical module.
- The stage module can move along the Y-axis.
- A measurement specimen can be placed on the measurement specimen placement part.
- A reference or correction specimen can be selectively mounted on the specimen mounting part.
- The specimen mounting part can move along the Z-axis.
Potential Applications
- Thickness measurement in various industries such as semiconductor manufacturing, materials science, and quality control.
- Non-destructive testing of thin films, coatings, and layers.
- Research and development of new materials and processes.
Problems Solved
- Accurate and precise measurement of thickness in various materials.
- Ability to mount reference or correction specimens for calibration purposes.
- Easy movement and positioning of the measurement specimen and mounting parts.
Benefits
- Improved accuracy and precision in thickness measurement.
- Flexibility to mount different types of specimens for calibration.
- Easy and efficient movement and positioning of the measurement specimen and mounting parts.
Original Abstract Submitted
A thickness measurement device can include a stage module, an upper optical module above the stage module and spaced from the stage module in a Z-axis direction, a lower optical module below the stage module and spaced from the stage module in the Z-axis direction. The stage module has a larger area than the upper optical module and the lower optical module, a Y-axis movement mechanism for moving the stage along a Y-axis direction, a measurement specimen placement part which is disposed on the stage and on which a measurement specimen is placed, a specimen mounting part on which one of a reference specimen or a correction specimen is selectively mounted, and a specimen mounting part movement mechanism that is disposed on the stage and moves the specimen mounting part along the Z-axis direction.
