17994487. SEPARATE EPITAXY IN MONOLITHIC STACKED AND STEPPED NANOSHEETS simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)

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SEPARATE EPITAXY IN MONOLITHIC STACKED AND STEPPED NANOSHEETS

Organization Name

INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor(s)

Indira Seshadri of Niskayuna NY (US)

Su Chen Fan of Cohoes NY (US)

Jay William Strane of Warwick NY (US)

Stuart Sieg of Albany NY (US)

Shogo Mochizuki of Mechanicville NY (US)

SEPARATE EPITAXY IN MONOLITHIC STACKED AND STEPPED NANOSHEETS - A simplified explanation of the abstract

This abstract first appeared for US patent application 17994487 titled 'SEPARATE EPITAXY IN MONOLITHIC STACKED AND STEPPED NANOSHEETS

Simplified Explanation

The semiconductor structure described in the patent application includes semiconductor layers of two nanosheet stacks, with the second nanosheet stack having a stepped formation with respect to the first nanosheet stack. Additionally, there are first and second epitaxial growths formed adjacent to the semiconductor layers of the respective nanosheet stacks, with the second epitaxial growth having a greater volume than the first epitaxial growth.

  • Semiconductor structure with two nanosheet stacks
  • Second nanosheet stack has a stepped formation
  • First and second epitaxial growths adjacent to respective nanosheet stacks
  • Second epitaxial growth has a greater volume than the first epitaxial growth

Potential Applications

The technology described in the patent application could potentially be used in:

  • Advanced semiconductor devices
  • High-performance electronic components
  • Next-generation computing systems

Problems Solved

This technology addresses the following issues:

  • Enhancing semiconductor performance
  • Improving device efficiency
  • Increasing processing speed

Benefits

The benefits of this technology include:

  • Higher performance capabilities
  • Improved energy efficiency
  • Enhanced overall device functionality

Potential Commercial Applications

The semiconductor structure innovation could have commercial applications in:

  • Semiconductor manufacturing industry
  • Electronics and consumer technology sector
  • Research and development for advanced devices

Possible Prior Art

One possible prior art related to this technology is the development of nanosheet structures in semiconductor devices to improve performance and efficiency.

Unanswered Questions

How does the stepped formation of the second nanosheet stack impact overall device performance?

The stepped formation of the second nanosheet stack may introduce new interfaces and material properties that could affect device characteristics such as carrier mobility and leakage current.

What are the specific manufacturing processes involved in creating the semiconductor structure described in the patent application?

The patent application does not provide detailed information on the specific techniques and methods used to fabricate the semiconductor structure with the two nanosheet stacks and epitaxial growths.


Original Abstract Submitted

A semiconductor structure is presented including semiconductor layers of a first nanosheet stack, semiconductor layers of a second nanosheet stack formed over and having a stepped nanosheet formation with respect to the semiconductor layers of the first nanosheet stack, a first epitaxial growth formed adjacent the semiconductor layers of the first nanosheet stack, and a second epitaxial growth formed adjacent the semiconductor layers of the second nanosheet stack such that the second epitaxial growth has a stepped formation with respect to the first epitaxial growth. The second epitaxial growth has a volume greater than a volume of the first epitaxial growth.