17985393. MONOLITHIC SUBSTRATE SUPPORT HAVING POROUS FEATURES AND METHODS OF FORMING THE SAME simplified abstract (Applied Materials, Inc.)
Contents
- 1 MONOLITHIC SUBSTRATE SUPPORT HAVING POROUS FEATURES AND METHODS OF FORMING THE SAME
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 MONOLITHIC SUBSTRATE SUPPORT HAVING POROUS FEATURES AND METHODS OF FORMING THE SAME - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Original Abstract Submitted
MONOLITHIC SUBSTRATE SUPPORT HAVING POROUS FEATURES AND METHODS OF FORMING THE SAME
Organization Name
Inventor(s)
Arvinder Manmohan Singh Chadha of San Jose CA (US)
Christopher Beaudry of San Jose CA (US)
MONOLITHIC SUBSTRATE SUPPORT HAVING POROUS FEATURES AND METHODS OF FORMING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 17985393 titled 'MONOLITHIC SUBSTRATE SUPPORT HAVING POROUS FEATURES AND METHODS OF FORMING THE SAME
Simplified Explanation
The abstract describes a method of forming a substrate support for a processing chamber by creating porous regions in ceramic green sheets, stacking them to form a ceramic laminate, and sintering them to create a monolithic ceramic body with porous plugs.
- The method involves forming porous regions in ceramic green sheets.
- The ceramic green sheets are stacked to create a ceramic laminate.
- Sintering the ceramic laminate results in a monolithic ceramic body with porous plugs.
Potential Applications
The technology could be used in the manufacturing of substrate supports for processing chambers in industries such as semiconductor fabrication, chemical processing, and materials research.
Problems Solved
1. Improved stability and durability of substrate supports in processing chambers. 2. Enhanced thermal and chemical resistance of the substrate support.
Benefits
1. Increased efficiency and reliability of processing chamber operations. 2. Extended lifespan of substrate supports, reducing maintenance costs.
Potential Commercial Applications
Optimizing Substrate Supports for Processing Chambers: Enhancing Performance and Durability
Possible Prior Art
There may be prior art related to the formation of porous plugs in ceramic bodies for various industrial applications. Research in the field of ceramic materials and processing techniques may reveal similar methods or technologies.
Unanswered Questions
How does this technology compare to traditional substrate support materials and manufacturing methods?
The article does not provide a direct comparison between this innovative method and traditional materials or manufacturing techniques. It would be beneficial to understand the advantages and limitations of this new approach in relation to existing practices.
What specific industries or applications could benefit the most from this technology?
While the abstract mentions potential applications in processing chambers, it does not delve into specific industries or use cases where this technology could have the most significant impact. Identifying key sectors that could benefit from this innovation would provide valuable insights for potential commercialization strategies.
Original Abstract Submitted
A method of forming a substrate support for use in a processing chamber includes forming a porous region in each of a plurality of ceramic green sheets, stacking the plurality of ceramic green sheets, each having the porous region formed therein, to form a ceramic laminate, and sintering the ceramic laminate to form a monolithic ceramic body having a porous plug formed therein. The porous plug includes the porous regions in the plurality of ceramic green sheets that are sintered.
