17871075. MEMS DEVICE AND MANUFACTURING METHOD THEREOF simplified abstract (HYUNDAI MOTOR COMPANY)
Contents
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
Organization Name
Inventor(s)
Jang Hyeon Lee of Gunpo-si (KR)
Hyun Soo Kim of Yongin-si (KR)
MEMS DEVICE AND MANUFACTURING METHOD THEREOF - A simplified explanation of the abstract
This abstract first appeared for US patent application 17871075 titled 'MEMS DEVICE AND MANUFACTURING METHOD THEREOF
Simplified Explanation
The present disclosure is about a microelectromechanical systems (MEMS) device and its manufacturing method that aims to improve the uniformity of temperature distribution in a heater unit. The device includes a heater unit formed on a substrate and a dummy pattern unit formed in the remaining portion of the substrate, which is not electrically connected to the heater unit.
- The device is a microelectromechanical systems (MEMS) device.
- It includes a heater unit formed on a substrate.
- A dummy pattern unit is formed in the remaining portion of the substrate.
- The dummy pattern unit is not electrically connected to the heater unit.
- The purpose is to improve the uniformity of temperature distribution in the heater unit.
Potential Applications
This technology can have various potential applications, including:
- Microheaters for gas sensors
- Thermal actuators for microvalves
- Microfluidic devices requiring precise temperature control
Problems Solved
The technology addresses the following problems:
- Non-uniform temperature distribution in heater units
- Inefficient heat transfer in MEMS devices
- Inaccurate temperature control in microheaters
Benefits
The benefits of this technology are:
- Improved uniformity of temperature distribution in the heater unit
- Enhanced heat transfer efficiency in MEMS devices
- More accurate temperature control in microheaters
Original Abstract Submitted
The present disclosure relates to a microelectromechanical systems (MEMS) device and method for manufacturing the same for improving the uniformity of temperature distribution in a heater unit, and the present disclosure discloses a MEMS device and method for manufacturing the same, including a heater unit that is formed on a substrate, and a dummy pattern unit that is formed in a remaining portion except for a portion where the heater unit is formed so as not to be electrically connected to the heater unit.
