US Patent Application 18447353. CHEMICAL DISPENSING SYSTEM simplified abstract
Contents
CHEMICAL DISPENSING SYSTEM
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.==Inventor(s)==
[[Category:Ming-Chieh Hsu of Hsinchu City (TW)]]
[[Category:Yung-Long Chen of New Taipei City (TW)]]
[[Category:Fang-Pin Chiang of Taichung City (TW)]]
[[Category:Feng-An Yang of Hsinchu City (TW)]]
[[Category:Ching-Jung Hsu of Hsinchu City (TW)]]
[[Category:Chi-Tung Lai of Hsinchu (TW)]]
CHEMICAL DISPENSING SYSTEM - A simplified explanation of the abstract
This abstract first appeared for US patent application 18447353 titled 'CHEMICAL DISPENSING SYSTEM
Simplified Explanation
The patent application describes a chemical dispensing system for semiconductor processing.
- The system has independent chemical supply lines for production and testing, reducing downtime and increasing throughput.
- It allows for testing a larger quantity of chemical batches without impacting production, improving quality control.
- The system can also filter the chemical directly from a storage drum through a filtration loop.
Original Abstract Submitted
A chemical dispensing system is capable of simultaneously supplying a semiconductor processing chemical for production and testing through the use of independent chemical supply lines, which reduces production downtime of an associated semiconductor process, increases throughput and capability of the semiconductor process, and/or the like. Moreover, the capability to simultaneously supply the semiconductor processing chemical for production and testing allows for an increased quantity of semiconductor processing chemical batches to be tested with minimal impact to production, which increases quality control over the semiconductor processing chemical. In addition, the independent chemical supply lines may be used to supply the semiconductor processing chemical to production while independently filtering semiconductor processing chemical directly from a storage drum through a filtration loop.
