Tokyo Electron Limited Patent Application Trends in 2024
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Tokyo Electron Limited Patent Filing Activity
Tokyo Electron Limited patent applications in 2024
Top 10 Technology Areas
- H01J37/32449 (Gas-filled discharge tubes (heating by discharge)
- Count: 39 patents
- Example: 20240229238. FILM FORMING DEVICE AND FILM FORMING METHOD simplified abstract (TOKYO ELECTRON LIMITED)
- H01J2237/334 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps)
- Count: 39 patents
- Example: 20240234097. ETCHING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- H01J37/32715 (Gas-filled discharge tubes (heating by discharge)
- H01J2237/332 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps)
- H01J37/32091 (Gas-filled discharge tubes (heating by discharge)
- H01J37/32724 (Gas-filled discharge tubes (heating by discharge)
- H01L21/31116 ({by dry-etching})
- H01J37/3244 (Gas-filled discharge tubes (heating by discharge)
- Count: 21 patents
- Example: 20240234097. ETCHING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- H01J37/32568 (Gas-filled discharge tubes (heating by discharge)
- H01L21/31144 ({using masks})
Emerging Technology Areas
- H05H1/4652 (using applied electromagnetic fields, e.g. high frequency or microwave energy ()
- Count: 1 patents
- Example: 20240049379. PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- H05H1/46 (using applied electromagnetic fields, e.g. high frequency or microwave energy ()
- Count: 1 patents
- Example: 20240049379. PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- H01L21/76895 (Applying interconnections to be used for carrying current between separate components within a device {comprising conductors and dielectrics})
- H01L21/76843 ({formed in openings in a dielectric})
- H01L23/5226 (SEMICONDUCTOR DEVICES NOT COVERED BY CLASS)
- H01L2224/8013 (SEMICONDUCTOR DEVICES NOT COVERED BY CLASS)
- Count: 1 patents
- Example: 20240047257. BONDING SYSTEM simplified abstract (Tokyo Electron Limited)
- B08B3/14 (Removing waste, e.g. labels, from cleaning liquid; {Regenerating cleaning liquids} (treatment of water in general)
- H01J2237/024 (Moving components not otherwise provided for (diaphragms)
- Count: 1 patents
- Example: 20240047184. PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- G06T15/00 (3D [Three Dimensional] image rendering)
- G06T7/80 (Analysis of captured images to determine intrinsic or extrinsic camera parameters, i.e. camera calibration)
Top Inventors
- H. Jim Fulford of Albany NY (US) (13 patents)
- Mark I. Gardner of Albany NY (US) (13 patents)
- Yohei YAMASHITA (9 patents)
- Eric Chih-Fang Liu of Albany NY (US) (9 patents)
- Sergey Voronin of Albany NY (US) (8 patents)
- Taro IKEDA (8 patents)
- Maju TOMURA (8 patents)
- Henan Zhang of Albany NY (US) (7 patents)
- Kazushi KANEKO (6 patents)
- Kandabara Tapily of Albany NY (US) (6 patents)
Patent Categories
Geographical Distribution of Inventors
Geographical Distribution of US Inventors
Categories:
- Tokyo Electron Limited
- Companies
- CPC B05C11/11
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- CPC C23C16/505
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- CPC H01J37/32449
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