Samsung electronics co., ltd. (20240321619). SUBSTRATE SUPPORTER simplified abstract
Contents
SUBSTRATE SUPPORTER
Organization Name
Inventor(s)
Jun Hyung Kim of Suwon-si (KR)
SUBSTRATE SUPPORTER - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240321619 titled 'SUBSTRATE SUPPORTER
The present disclosure pertains to substrate supporters and substrate processing apparatuses. An example substrate supporter includes an upper surface for loading a substrate, a base, an outer dam along an edge of the base, a contact band connected to the outer dam for loading the substrate, and a first contact pattern adjacent to the contact band, extending into the inside of the contact band.
- The substrate supporter has an outer dam and a contact band for securely holding the substrate in place.
- The first contact pattern extends along the circumferential direction of the base, providing additional support to the substrate.
- The area of the first contact pattern is larger than where the contact band overlaps with the substrate, ensuring stability during processing.
- This design helps prevent substrate misalignment or damage during processing.
- The substrate supporter is designed to improve the efficiency and accuracy of substrate processing.
Potential Applications: - Semiconductor manufacturing - Flat panel display production - Printed circuit board assembly
Problems Solved: - Substrate misalignment during processing - Substrate damage due to inadequate support - Inefficient substrate processing
Benefits: - Enhanced substrate stability - Improved processing accuracy - Reduced risk of substrate damage
Commercial Applications: Title: Advanced Substrate Supporter for Precision Manufacturing This technology can be utilized in industries such as semiconductor manufacturing, flat panel display production, and printed circuit board assembly to improve processing efficiency and accuracy.
Prior Art: Readers can explore prior art related to substrate supporters and processing apparatuses in the field of semiconductor manufacturing and related industries.
Frequently Updated Research: Stay updated on the latest advancements in substrate processing technology and related innovations to enhance manufacturing processes.
Questions about Substrate Supporters: 1. How does the first contact pattern contribute to substrate stability? The first contact pattern extends into the inside of the contact band, providing additional support to the substrate. 2. What are the potential applications of this advanced substrate supporter technology? This technology can be applied in semiconductor manufacturing, flat panel display production, and printed circuit board assembly for improved processing efficiency and accuracy.
Original Abstract Submitted
the present disclosure relates to substrate supporters and substrate processing apparatuses. an example substrate supporter includes an upper surface on which a substrate is loaded, a base, an outer dam extending along an edge of the base, a contact band connected with the outer dam, extending along the circumferential direction of the base, and onto which the substrate is loaded, and a first contact pattern disposed adjacent to the contact band and extending into an inside of the contact band, the first contact pattern extending along the circumferential direction of the base, where an area of the first contact pattern is larger than an area where the contact band overlaps with the substrate.
