Samsung electronics co., ltd. (20240321599). CHEMICAL SUPPLY APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract
CHEMICAL SUPPLY APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME
Organization Name
Inventor(s)
Dongchan Choi of Suwon-si (KR)
CHEMICAL SUPPLY APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240321599 titled 'CHEMICAL SUPPLY APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME
Simplified Explanation: The patent application describes a semiconductor fabrication system that includes a chemical supply apparatus for supplying chemicals to a substrate processing apparatus.
Key Features and Innovation:
- Semiconductor fabrication system with a chemical supply apparatus
- Main tank for storing chemicals
- Supply line connecting the main tank to the substrate processing apparatus
- Recycle tank connected to the outlet of the substrate processing apparatus
- Recycle filtering device with a photocatalytic reactor and nanofilter
- Connection line between the photocatalytic reactor and nanofilter
Potential Applications: This technology can be used in semiconductor manufacturing processes, specifically in supplying chemicals to substrate processing equipment.
Problems Solved: The system addresses the need for efficient and controlled chemical supply in semiconductor fabrication, ensuring the quality and consistency of the manufacturing process.
Benefits:
- Improved control over chemical supply
- Enhanced quality and consistency in semiconductor fabrication
- Potential cost savings through efficient recycling of chemicals
Commercial Applications: The technology can be utilized in semiconductor fabrication facilities to optimize chemical supply processes, leading to improved production efficiency and product quality.
Prior Art: Readers can explore prior patents related to chemical supply systems in semiconductor fabrication to understand the evolution of similar technologies.
Frequently Updated Research: Stay informed about the latest advancements in chemical supply systems for semiconductor fabrication to ensure the implementation of cutting-edge technologies.
Questions about Semiconductor Fabrication Systems: 1. How does the chemical supply apparatus improve the efficiency of semiconductor fabrication processes? 2. What are the key components of the recycle filtering device in the chemical supply apparatus?
Original Abstract Submitted
disclosed are semiconductor fabrication systems, chemical supply apparatuses, and substrate processing methods. the semiconductor fabrication system comprises a substrate processing apparatus and a chemical supply apparatus that supplies the substrate processing apparatus with a chemical. the chemical supply apparatus includes a main tank, a supply line that connects the main tank to an inlet of the substrate processing apparatus, a recycle tank connected to an outlet of the substrate processing apparatus, and a recycle filtering device between the recycle tank and the main tank. the recycle filtering device includes a photocatalytic reactor, a nanofilter between the photocatalytic reactor and the main tank, and a connection line that connects the photocatalytic reactor to the nanofilter.
