Category:Makoto KASHIWAGI
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Makoto KASHIWAGI
Executive Summary
Makoto KASHIWAGI is an inventor who has filed 4 patents. Their primary areas of innovation include {comprising at least one polishing chamber (polishing apparatuses (1 patents), MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth (1 patents), {by chemical mechanical polishing [CMP]} (1 patents), and they have worked with companies such as EBARA CORPORATION (4 patents). Their most frequent collaborators include (2 collaborations), (1 collaborations), (1 collaborations).
Patent Filing Activity
Technology Areas
List of Technology Areas
- H01L21/67219 ({comprising at least one polishing chamber (polishing apparatuses): 1 patents
- B24B37/32 (MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth): 1 patents
- H01L21/3212 ({by chemical mechanical polishing [CMP]}): 1 patents
- H01L21/304 (Mechanical treatment, e.g. grinding, polishing, cutting {(): 1 patents
- B23Q3/062 (DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING (tools of the kind used in lathes or boring machines): 1 patents
- B23Q3/088 (DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING (tools of the kind used in lathes or boring machines): 1 patents
- B24B37/042 (designed for working plane surfaces): 1 patents
- B24B7/228 ({for grinding thin, brittle parts, e.g. semiconductors, wafers (grinding edges of thin, brittle parts): 1 patents
- B24B21/004 (Machines or devices using grinding or polishing belts (for sharpening cutting edges of tools): 1 patents
- B24B21/008 (Machines or devices using grinding or polishing belts (for sharpening cutting edges of tools): 1 patents
- B24B21/10 (MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth): 1 patents
- B24B37/005 (Control means for lapping machines or devices): 1 patents
- B24B37/105 (MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth): 1 patents
- B24B37/30 (MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth): 1 patents
- B24B41/067 (MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth): 1 patents
- H01L21/0209 ({Cleaning of wafer backside}): 1 patents
- H01L21/67034 (Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere (processes per se): 1 patents
- H01L21/67051 (Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere (processes per se): 1 patents
- H01L21/68728 (using mechanical means, e.g. chucks, clamps or pinches {(using elecrostatic chucks): 1 patents
- H01L21/68742 (using mechanical means, e.g. chucks, clamps or pinches {(using elecrostatic chucks): 1 patents
- H01L21/68764 (using mechanical means, e.g. chucks, clamps or pinches {(using elecrostatic chucks): 1 patents
- B24B21/08 (MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth): 1 patents
- B24B9/00 (Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor (): 1 patents
Companies
List of Companies
- EBARA CORPORATION: 4 patents
Collaborators
- Mao IZAWA (2 collaborations)
- Kenichi KOBAYASHI (1 collaborations)
- Masayuki NAKANISHI (1 collaborations)
- Manao HOSHINA (1 collaborations)
- Satoru YAMAMOTO (1 collaborations)
- Keisuke UCHIYAMA (1 collaborations)