18817577. ROTATING SUBSTRATE SUPPORT (ASM IP Holding B.V.)
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Contents
ROTATING SUBSTRATE SUPPORT
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Inventor(s)
ROTATING SUBSTRATE SUPPORT
This abstract first appeared for US patent application 18817577 titled 'ROTATING SUBSTRATE SUPPORT
Original Abstract Submitted
An apparatus for processing a substrate may comprise a reaction chamber, a substrate support disposed within the reaction chamber and provided with a support surface to support the substrate, and a motor to provide a rotary movement, wherein the motor is controlled and configured to create a bidirectional rotary movement between the reaction chamber and the substrate support around an axis perpendicular to the support surface.
