18633359. TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)
Contents
TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
Organization Name
Inventor(s)
NAOKI Funabashi of Tochigi (JP)
MIZUKI Narimatsu of Tochigi (JP)
TSUTOMU Takenaka of Tochigi (JP)
TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18633359 titled 'TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
The temperature adjustment apparatus described in the patent application includes a blowing unit that directs a temperature-adjusted gas towards the optical path of an optical system through an opening with a specific shape.
- The outer periphery of the opening includes a depressed portion that is inwardly curved from the circumscribed circle of the opening.
- The angle at the intersection point inside the opening is 180 degrees or more when the position nearest to the center of the circumscribed circle is at the intersection of two straight line portions, two curved line portions, or a straight line portion and a curved line portion.
Potential Applications: - This technology can be used in optical systems that require precise temperature control to maintain optimal performance. - It can be applied in scientific instruments, medical devices, and industrial machinery where temperature stability is crucial.
Problems Solved: - Ensures accurate temperature adjustment in optical systems. - Helps maintain the integrity and functionality of sensitive equipment.
Benefits: - Improved performance and longevity of optical systems. - Enhanced precision in temperature control for various applications.
Commercial Applications: - Precision optical instruments manufacturing industry. - Scientific research institutions. - Medical equipment manufacturers.
Questions about the technology: 1. How does the depressed portion of the opening contribute to the temperature adjustment process? 2. What are the specific advantages of using a blowing unit in this temperature adjustment apparatus?
Frequently Updated Research: - Stay updated on advancements in temperature control technology for optical systems to enhance the efficiency and accuracy of the apparatus.
Original Abstract Submitted
A temperature adjustment apparatus includes a blowing unit configured to blow a temperature-adjusted gas to an optical path of an optical system via an opening portion, wherein a shape of an outer periphery of the opening portion includes a depressed portion depressed inward from a circumscribed circle of the opening portion, wherein in a case where a position nearest to a center of the circumscribed circle in the depressed portion is any of an intersection point of two straight line portions, an intersection point of two curved line portions, and an intersection point of a straight line portion and a curved line portion, an angle at the intersection point inside the opening portion is 180 degrees or more.
