18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation)
Contents
PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES
Organization Name
Inventor(s)
Andrew V. Hill of Sunriver OR (US)
Jonathan Madsen of Los Altos CA (US)
Yuval Lubashevsky of Haifa (IL)
PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES - A simplified explanation of the abstract
This abstract first appeared for US patent application 18624444 titled 'PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES
The patent application describes a device with optical elements, including metasurfaces, that manipulate illumination and sample light using sub-wavelength features.
- The device directs illumination to a sample and collects sample light using optical elements with metasurfaces.
- Metasurfaces manipulate the illumination or sample light with sub-wavelength features smaller than some wavelengths.
- The optical elements provide optical power for focusing the illumination on the sample or collecting the sample light from the sample.
Potential Applications: - Biomedical imaging - Material analysis - Environmental monitoring
Problems Solved: - Enhances precision in directing and collecting light - Improves imaging quality - Enables sub-wavelength manipulation of light
Benefits: - Increased accuracy in sample analysis - Enhanced imaging resolution - Versatile applications in various fields
Commercial Applications: Title: Advanced Optical Devices for High-Resolution Imaging This technology can be used in medical diagnostics, scientific research, and industrial quality control processes, leading to improved efficiency and accuracy in various industries.
Prior Art: Researchers can explore prior patents related to metasurfaces, optical elements, and sub-wavelength manipulation in optical devices to understand the existing technology landscape.
Frequently Updated Research: Stay updated on advancements in metasurface technology, optical imaging techniques, and sub-wavelength manipulation for potential improvements in optical devices.
Questions about Optical Devices with Metasurfaces: 1. How do metasurfaces enhance the manipulation of light in optical devices? Metasurfaces use sub-wavelength features to control the behavior of light, allowing for precise manipulation and focusing. 2. What are the key advantages of using optical elements with metasurfaces in sample analysis? Optical elements with metasurfaces offer improved resolution, accuracy, and versatility in various applications compared to traditional optical devices.
Original Abstract Submitted
A device may one or more optical elements configured to direct illumination to a sample and collect sample light from the sample in response to the illumination, where at least one of the one or more optical elements include one or more metasurfaces configured to manipulate at least one of the illumination or sample light using sub-wavelength features, where the sub-wavelength features are smaller than at least some wavelengths in at least one of the illumination or the sample light being manipulated, and where the one or more optical elements provide optical power for at least one of focusing the illumination on the sample or collecting the sample light from the sample.
