18517362. PIEZOELECTRIC INTERFEROMETER simplified abstract (Murata Manufacturing Co., Ltd.)

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PIEZOELECTRIC INTERFEROMETER

Organization Name

Murata Manufacturing Co., Ltd.

Inventor(s)

Ville Kaajakari of Helsinki (FI)

PIEZOELECTRIC INTERFEROMETER - A simplified explanation of the abstract

This abstract first appeared for US patent application 18517362 titled 'PIEZOELECTRIC INTERFEROMETER

Simplified Explanation

The patent application describes an interferometer with a reflection region, support region, and actuation regions, along with a piezoelectric layer and reflectors for precise measurements.

  • The interferometer includes a reflection region, support region, and two or more actuation regions.
  • Each actuation region extends from the support region to the reflection region.
  • A first reflector is fixed to the substrate in the reflection region.
  • The interferometer features a piezoelectric layer in the actuation regions.
  • A second reflector is attached to the piezoelectric layer.

Potential Applications

The technology could be used in precision measurement devices, optical instruments, and scientific research equipment.

Problems Solved

The interferometer helps in achieving accurate and precise measurements in various applications by utilizing the piezoelectric layer for actuation.

Benefits

The interferometer offers high precision, stability, and reliability in measuring distances and optical properties.

Potential Commercial Applications

The technology could be applied in industries such as semiconductor manufacturing, metrology, astronomy, and telecommunications for high-precision measurements.

Possible Prior Art

Prior art may include interferometers with similar components and functionalities used in scientific and industrial applications.

Unanswered Questions

How does the piezoelectric layer contribute to the accuracy of the interferometer measurements?

The piezoelectric layer in the actuation regions helps in precise control and adjustment of the reflectors, leading to accurate measurements in the interferometer.

What are the potential limitations or challenges in implementing this interferometer technology in real-world applications?

Some potential challenges could include calibration requirements, environmental factors affecting performance, and integration with existing systems or instruments.


Original Abstract Submitted

An interferometer is provided that includes a reflection region, a support region and two or more actuation regions. Each of the two or more actuation regions extend from the support region to the reflection region. A first reflector is fixed to the substrate at least in the reflection region. The interferometer includes a piezoelectric layer at least in the two or more actuation regions. Moreover, a second reflector is attached to the piezoelectric layer.