18181491. FABRICATION TOOL CALIBRATION simplified abstract (Applied Materials, Inc.)
Contents
FABRICATION TOOL CALIBRATION
Organization Name
Inventor(s)
Gautham Bammanahalli of Newark CA (US)
Nathaniel Moore of San Jose CA (US)
FABRICATION TOOL CALIBRATION - A simplified explanation of the abstract
This abstract first appeared for US patent application 18181491 titled 'FABRICATION TOOL CALIBRATION
Simplified Explanation:
This patent application describes a method for calibrating a fabrication system by selecting a calibration recipe based on the relationship between process parameters and substrate characteristics.
- The method involves receiving characterization data for multiple recipes and substrates.
- Determining a process relationship between the process parameters and substrate states.
- Selecting a calibration recipe based on the process relationships and threshold variations.
- Providing the calibration recipe and threshold variation for calibrating the fabrication system.
Key Features and Innovation:
- Selection of a calibration recipe based on process relationships.
- Determination of threshold variations for process parameters.
- Calibration of the fabrication system for improved performance.
Potential Applications:
This technology can be applied in various industries such as semiconductor manufacturing, electronics production, and material processing.
Problems Solved:
- Ensures accurate calibration of fabrication systems.
- Improves process efficiency and quality.
- Reduces errors and variability in fabrication processes.
Benefits:
- Enhanced accuracy in fabrication processes.
- Increased productivity and yield.
- Cost savings through optimized calibration.
Commercial Applications:
Calibration services for fabrication systems, equipment manufacturers, semiconductor companies, and research institutions can benefit from this technology.
Questions about Calibration Recipe Selection: 1. How does the method determine the process relationship between the first and second process parameters? 2. What are the potential implications of using threshold variations in calibration recipes?
Frequently Updated Research:
Ongoing research in process optimization, substrate characterization, and calibration techniques can further enhance the effectiveness of this technology.
Original Abstract Submitted
A method for calibrating a fabrication system including selecting, from multiple recipes, a calibration recipe including a first process parameter for performing a fabrication process on a substrate, including: for each recipe and for two or more substrates, characterization data representative of the fabrication process performed on the two or more substrates using the recipe is received. A second process parameter is determined from the first and second states of the substrates, and a process relationship is determined between the first process parameter and the second process parameter for the recipe. The calibration recipe is selected from the multiple recipes based on the respective process relationships, a threshold variation for the process relationship is determined between the first and the second process parameter; and the calibration recipe and the threshold variation are provided for calibrating the fabrication system.
