US Patent Application 18447361. MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW simplified abstract

MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW

Organization Name

Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor(s)

Chun-Kai Chang of Tainan City (TW)

Yu Sheng Chiang of Chiayi City (TW)

Yu De Liou of Taichung City (TW)

Chi Yang of Tainan City (TW)

Ching-Juinn Huang of Changhua (TW)

Po-Chung Cheng of Chiayi County (TW)

MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW - A simplified explanation of the abstract

This abstract first appeared for US patent application 18447361 titled 'MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW

Simplified Explanation

The patent application describes an extreme ultraviolet (EUV) source that includes a module vessel and a scrubber system.

• The scrubber system consists of multiple gutters within the module vessel.
• The gutters include a first gutter and a second gutter.
• The second gutter is positioned lower than the first gutter in the module vessel.
• The unit volume of the second gutter is larger than the unit volume of the first gutter.

Original Abstract Submitted

An extreme ultraviolet (EUV) source includes a module vessel and a scrubber system. The scrubber system may include a plurality of gutters in the module vessel. The plurality of gutters may include a first gutter and a second gutter. The second gutter may be lower than the first gutter in the module vessel. A unit volume of the second gutter is larger than a unit volume of the first gutter.