18603316. ANALYSIS METHOD simplified abstract (CANON KABUSHIKI KAISHA)
Contents
ANALYSIS METHOD
Organization Name
Inventor(s)
YOSHIHIRO Shiode of Tochigi (JP)
ANALYSIS METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18603316 titled 'ANALYSIS METHOD
Simplified Explanation: The patent application describes a method for analyzing a process in semiconductor device manufacturing using data sets to generate learning data and a model for the process.
- **Key Features and Innovation:**
- Preparation of data sets with input and output for a simulator. - Generation of learning data based on process information and evaluation information. - Creation of a model through learning from the generated data.
- **Potential Applications:**
- Quality control in semiconductor manufacturing processes. - Optimization of manufacturing processes for efficiency and cost-effectiveness.
- **Problems Solved:**
- Lack of efficient methods for analyzing and optimizing semiconductor manufacturing processes. - Difficulty in predicting and controlling outcomes in the manufacturing process.
- **Benefits:**
- Improved quality control and process optimization. - Enhanced efficiency and cost savings in semiconductor manufacturing.
- **Commercial Applications:**
- "Process Analysis and Optimization Method for Semiconductor Manufacturing" can be utilized by semiconductor companies to improve their manufacturing processes, leading to higher quality products and reduced production costs.
- **Prior Art:**
- Researchers and engineers in the semiconductor industry may find relevant prior art in studies on process optimization and control in semiconductor manufacturing.
- **Frequently Updated Research:**
- Stay updated on advancements in machine learning algorithms for process optimization in semiconductor manufacturing.
Questions about Process Analysis and Optimization Method for Semiconductor Manufacturing:
1. *How does this method contribute to improving the efficiency of semiconductor manufacturing processes?*
This method utilizes learning data to generate a model that can predict outcomes and optimize the manufacturing process, leading to increased efficiency.
2. *What are the potential implications of implementing this method in the semiconductor industry?*
Implementing this method can result in higher quality semiconductor devices, reduced production costs, and improved competitiveness in the market.
Original Abstract Submitted
An analysis method of analyzing a process for manufacturing a semiconductor device, includes a preparing step of preparing a plurality of data sets each including an input to a simulator that simulates the process and an output from the simulator, a generating step of generating, based on the plurality of data sets, a plurality of learning data having, as a value of an explanatory variable, a value of information, of process information associated with at least one of control and a state of the process, to which attention is to be paid and a value of evaluation information for evaluating the process as a valued of an objective variable, and a learning step of generating a model expressing the process by performing learning based on the plurality of learning data generated in the generating step.
