LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

Abstract: a laser device includes a laser oscillation device configured to output pulse laser light; a beam intensity distribution measurement device configured to measure a beam intensity distribution of the pulse laser light; a beam angle distribution measurement device configured to measure a beam angle distribution of the pulse laser light; a pulse waveform measurement device configured to measure a pulse waveform of the pulse laser light; a spectrum measurement device configured to measure a spectrum of the pulse laser light; and a laser controller configured to calculate a speckle contrast based on measurement data of each of the beam intensity distribution, the beam angle distribution, the pulse waveform, and the spectrum.

Inventor(s): Takamitsu KOMAKI, Toshihiro OGA, Takehiko TOMONAGA, Takahito KUMAZAKI

CPC Classification: H01S3/1305 (DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL)

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