20250185526. Semiconductor Structure Preparation Me (XIAMEN INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE ., .)

SEMICONDUCTOR STRUCTURE AND PREPARATION METHOD THEREOF

Abstract: a semiconductor structure and a preparation method thereof are provided. the semiconductor structure includes: a substrate; and a plurality of resistive devices, disposed on the substrate; each of the resistive devices includes a lower electrode, a resistive layer and an upper electrode, a groove is formed in the lower electrode to form a concave structure, the resistive layer covers a side wall and a bottom of the groove and an outer surface of the lower electrode, and the upper electrode covers a surface of the resistive layer and fills the groove.

Inventor(s): Enping CHENG, Taiwei CHIU

CPC Classification: H10N70/8418 ()

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