SCANNING PATTERNS FOR SCIENTIFIC INSTRUMENTS

Abstract: systems and methods for adjusting scanning patterns in scientific instruments based on electromagnetic interference. one example charged particle instrument includes a chamber supporting a sample, a column coupled to the chamber, a pump configured to establish a vacuum within the chamber, a sensing device configured to detect a measure of a frequency of electromagnetic interference generated via the pump, and a controller including an electronic processor and a memory. the column includes a charged particle source configured to generate a charged particle beam traveling through the column and into the chamber. the charged particle beam is generated according to a scanning pattern. the controller configured to receive, from the sensing device, a signal indicative of the frequency of the electromagnetic interference and adjust the scanning pattern based on the frequency of the electromagnetic interference.

Inventor(s): Gert-Jan de Vos, Joris Achten, Addo Hammen, Kees Kooijman, Sander Stoks

CPC Classification: H01J37/265 (Electron or ion microscopes; Electron or ion diffraction tubes)

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