18741245. CHEMICAL LIQUID EXCHANGE METHOD, CHEMICAL LIQUID SUPPLY SYSTEM, AND CHEMICAL LIQUID RECYCLING METHOD (Samsung Electronics Co., Ltd.)

CHEMICAL LIQUID EXCHANGE METHOD, CHEMICAL LIQUID SUPPLY SYSTEM, AND CHEMICAL LIQUID RECYCLING METHOD

Organization Name

Samsung Electronics Co., Ltd.

Inventor(s)

SUNGHYUN Park of Suwon-si KR

Minsuk Kang of Suwon-si KR

Young-Hoo Kim of Suwon-si KR

Jinseon You of Suwon-si KR

Tae-Hong Kim of Suwon-si KR

Woogwan Shim of Suwon-si KR

CHEMICAL LIQUID EXCHANGE METHOD, CHEMICAL LIQUID SUPPLY SYSTEM, AND CHEMICAL LIQUID RECYCLING METHOD

This abstract first appeared for US patent application 18741245 titled 'CHEMICAL LIQUID EXCHANGE METHOD, CHEMICAL LIQUID SUPPLY SYSTEM, AND CHEMICAL LIQUID RECYCLING METHOD

Original Abstract Submitted

A chemical liquid exchange method includes: recovering, by a first recycling tank, a first portion of a first chemical liquid that was previously used in a chamber; recovering, by a second recycling tank, a second portion of the first chemical liquid that was previously used in the chamber; supplying, from the first recycling tank, the first portion of the first chemical liquid to a first sub-tank; draining, from the second recycling tank, the second portion of the first chemical liquid; supplying, from the first sub-tank, the first portion of the first chemical liquid to a main tank; and receiving, by a second sub-tank, a second chemical liquid from an outside; and supplying, from the second sub-tank, the second chemical liquid to the main tank.