19013256. TRANSFER ROBOT FOR TRANSFERRING GAS CONTAINER, GAS SUPPLY CABINET, AND GAS SUPPLY SYSTEM INCLUDING THE SAME (Samsung Electronics Co., Ltd.)

TRANSFER ROBOT FOR TRANSFERRING GAS CONTAINER, GAS SUPPLY CABINET, AND GAS SUPPLY SYSTEM INCLUDING THE SAME

Organization Name

Samsung Electronics Co., Ltd.

Inventor(s)

Kyeongsup Byeon of Suwon-si KR

Inwook Koo of Seoul KR

Dongwon Kim of Suwon-si KR

Minyoung Kim of Hwaseong-si KR

Yi Jin of Seoul KR

Jongkyu Kim of Suwon-si KR

Jinho So of Seoul KR

Byungjun An of Suwon-si KR

Yinghu Xu of Suwon-si KR

Beomsoo Hwang of Seoul KR

TRANSFER ROBOT FOR TRANSFERRING GAS CONTAINER, GAS SUPPLY CABINET, AND GAS SUPPLY SYSTEM INCLUDING THE SAME

This abstract first appeared for US patent application 19013256 titled 'TRANSFER ROBOT FOR TRANSFERRING GAS CONTAINER, GAS SUPPLY CABINET, AND GAS SUPPLY SYSTEM INCLUDING THE SAME

Original Abstract Submitted

A gas supply system includes a loading/unloading stage including a cradle loader where a cradle loaded with a gas container is loaded, a test buffer chamber is configured to test the gas container, and a loading/unloading robot configured to transfer the gas container between the cradle and the test buffer chamber. A gas supply stage includes a storage queue configured to temporarily store the gas container, a gas supply cabinet where the gas container is mounted, and a transfer robot configured to transfer the gas container between the test buffer chamber and the storage queue and between the storage queue and the gas supply cabinet.