Samsung electronics co., ltd. (20250147415). RESIST COMPOSITION AND METHOD OF FORMING PATTERNS USING THE SAME

RESIST COMPOSITION AND METHOD OF FORMING PATTERNS USING THE SAME

Organization Name

samsung electronics co., ltd.

Inventor(s)

Sunyoung Lee of Suwon-si KR

Haengdeog Koh of Suwon-si KR

Yoonhyun Kwak of Suwon-si KR

Jiyoun Lee of Suwon-si KR

Kyuhyun Im of Suwon-si KR

Jinwon Jeon of Suwon-si KR

Jungha Chae of Suwon-si KR

Minyoung Ha of Suwon-si KR

RESIST COMPOSITION AND METHOD OF FORMING PATTERNS USING THE SAME

This abstract first appeared for US patent application 20250147415 titled 'RESIST COMPOSITION AND METHOD OF FORMING PATTERNS USING THE SAME