19004085. POSITIONING EQUIPMENT, BONDING EQUIPMENT, POSITIONING METHOD AND BONDING METHOD (Panasonic Intellectual Property Management Co., Ltd.)

POSITIONING EQUIPMENT, BONDING EQUIPMENT, POSITIONING METHOD AND BONDING METHOD

Organization Name

Panasonic Intellectual Property Management Co., Ltd.

Inventor(s)

RYO Fujita of Hyogo JP

MASARU Hamahira of Fukuoka JP

POSITIONING EQUIPMENT, BONDING EQUIPMENT, POSITIONING METHOD AND BONDING METHOD

This abstract first appeared for US patent application 19004085 titled 'POSITIONING EQUIPMENT, BONDING EQUIPMENT, POSITIONING METHOD AND BONDING METHOD

Original Abstract Submitted

A positioning equipment includes a camera, a lens disposed in an imaging direction of the camera, a light synthesis unit, and an arithmetic equipment. The light synthesis unit is disposed between a bonding head and a stage when a first component and a second component are positioned, synthesizes light incident from the bonding head side and light incident from the stage side, and reflects the synthesized light to the lens side. The camera images a camera image based on light incident via the lens. The arithmetic equipment obtains a position correction amount between the first component and the second component based on the camera image.