18498811. INTEGRATED DEEP TRENCH CAPACITOR HAVING HIGH CAPACITANCE DENSITY AND VOLTAGE LINEARITY (TEXAS INSTRUMENTS INCORPORATED)

INTEGRATED DEEP TRENCH CAPACITOR HAVING HIGH CAPACITANCE DENSITY AND VOLTAGE LINEARITY

Organization Name

TEXAS INSTRUMENTS INCORPORATED

Inventor(s)

Poornika Gayathri Fernandes of Murphy TX US

Jack Qian of Plano TX US

INTEGRATED DEEP TRENCH CAPACITOR HAVING HIGH CAPACITANCE DENSITY AND VOLTAGE LINEARITY

This abstract first appeared for US patent application 18498811 titled 'INTEGRATED DEEP TRENCH CAPACITOR HAVING HIGH CAPACITANCE DENSITY AND VOLTAGE LINEARITY

Original Abstract Submitted

An integrated circuit including an integrated trench capacitor in a substrate. The trench capacitor includes a plurality of deep trenches extending into the substrate, the trenches filled with a conductive trench-fill material. A first subset of the trenches located in an N-type well and a second subset of the trenches located in a P-type well. A first capacitor terminal connects the conductive trench-fill material in the first subset of trenches and the conductive trench-fill material in the second subset of trenches. A second capacitor terminal connects the N-type well and the P-type well.