19005875. SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE (HUAWEI TECHNOLOGIES CO., LTD.)
SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE
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SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE
This abstract first appeared for US patent application 19005875 titled 'SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE
Original Abstract Submitted
A surface acoustic wave filter includes a support substrate with a first acoustic velocity layer disposed above. The first acoustic velocity layer is silicon dioxide with a piezoelectric layer above. Euler angles of a cut of the piezoelectric layer are (−5° to 5°, 81° to 83°, 85° to 95°), and an interdigital electrode is disposed above the piezoelectric layer. A second acoustic velocity layer included between the first acoustic velocity layer and the support substrate; and a material of the second acoustic velocity layer is aluminum nitride or silicon nitride, where a longitudinal wave acoustic velocity in the first acoustic velocity layer is lower than a longitudinal wave acoustic velocity in the piezoelectric layer, and a longitudinal wave acoustic velocity in the second acoustic velocity layer is higher than the longitudinal wave acoustic velocity in the piezoelectric layer.
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