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19005875. SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE (HUAWEI TECHNOLOGIES CO., LTD.)

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SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE

Organization Name

HUAWEI TECHNOLOGIES CO., LTD.

Inventor(s)

Zilin Li of Shanghai CN

Tao Han of Shanghai CN

Zhongzhi Luan of Shenzhen CN

Han Ke of Shanghai CN

Xiang Tao of Shanghai CN

Xin Jiang of Shenzhen CN

SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE

This abstract first appeared for US patent application 19005875 titled 'SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE

Original Abstract Submitted

A surface acoustic wave filter includes a support substrate with a first acoustic velocity layer disposed above. The first acoustic velocity layer is silicon dioxide with a piezoelectric layer above. Euler angles of a cut of the piezoelectric layer are (−5° to 5°, 81° to 83°, 85° to 95°), and an interdigital electrode is disposed above the piezoelectric layer. A second acoustic velocity layer included between the first acoustic velocity layer and the support substrate; and a material of the second acoustic velocity layer is aluminum nitride or silicon nitride, where a longitudinal wave acoustic velocity in the first acoustic velocity layer is lower than a longitudinal wave acoustic velocity in the piezoelectric layer, and a longitudinal wave acoustic velocity in the second acoustic velocity layer is higher than the longitudinal wave acoustic velocity in the piezoelectric layer.

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