Micron technology, inc. (20250140587). WAFER CARRIER WITH RETICLE TEMPLATE FOR MARKING RETICLE FIELDS ON A SEMICONDUCTOR WAFER

WAFER CARRIER WITH RETICLE TEMPLATE FOR MARKING RETICLE FIELDS ON A SEMICONDUCTOR WAFER

Organization Name

micron technology, inc.

Inventor(s)

Gabe Glass of Salt Lake City UT US

WAFER CARRIER WITH RETICLE TEMPLATE FOR MARKING RETICLE FIELDS ON A SEMICONDUCTOR WAFER

This abstract first appeared for US patent application 20250140587 titled 'WAFER CARRIER WITH RETICLE TEMPLATE FOR MARKING RETICLE FIELDS ON A SEMICONDUCTOR WAFER

Original Abstract Submitted

a wafer carrier assembly comprising a wafer carrier having a first and second side, the first side including: a circular recess configured to receive a semiconductor device wafer, and at least one cut-out arranged along the circumference of the circular recess. the first side also includes a carrier cover having a top and bottom side, the top side including: a plurality of gridlines extending to edges of the carrier cover, and a plurality of reticles extending from the top side to the bottom side where subsets of reticles are arranged to have a common center and each subset of reticles is arranged at each intersection of the plurality of gridlines.