Huawei technologies co., ltd. (20250141431). SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE
SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE
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SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE
This abstract first appeared for US patent application 20250141431 titled 'SURFACE ACOUSTIC WAVE FILTER, APPARATUS, AND ELECTRONIC DEVICE
Original Abstract Submitted
a surface acoustic wave filter includes a support substrate with a first acoustic velocity layer disposed above. the first acoustic velocity layer is silicon dioxide with a piezoelectric layer above. euler angles of a cut of the piezoelectric layer are (−5� to 5�, 81� to 83�, 85� to 95�), and an interdigital electrode is disposed above the piezoelectric layer. a second acoustic velocity layer included between the first acoustic velocity layer and the support substrate; and a material of the second acoustic velocity layer is aluminum nitride or silicon nitride, where a longitudinal wave acoustic velocity in the first acoustic velocity layer is lower than a longitudinal wave acoustic velocity in the piezoelectric layer, and a longitudinal wave acoustic velocity in the second acoustic velocity layer is higher than the longitudinal wave acoustic velocity in the piezoelectric layer.
