TRUMPF Lasersystems for Semiconductor Manufacturing GmbH (20240255767). METHOD AND DEVICE FOR GENERATING LASER PULSES

METHOD AND DEVICE FOR GENERATING LASER PULSES

Organization Name

TRUMPF Lasersystems for Semiconductor Manufacturing GmbH

Inventor(s)

Joachim Schulz of Gerlingen DE

Guenther Krauss of Holzgerlingen DE

METHOD AND DEVICE FOR GENERATING LASER PULSES

This abstract first appeared for US patent application 20240255767 titled 'METHOD AND DEVICE FOR GENERATING LASER PULSES

Original Abstract Submitted

a method for generating laser pulses includes generating first laser pulses and second laser pulses using at least one laser source, and amplifying the first laser pulses and second laser pulses using an optical amplifier. each respective second laser pulse passes through the optical amplifier offset in time in relation to a respective first laser pulse by a time offset. the method further includes separating the first laser pulses from the second laser pulses using an optical beam splitter based on at least one beam property, and passing the first laser pulses through a retardation unit. a time duration for each respective first laser pulse to pass through a retardation section of the retardation unit corresponds to the time offset. the method further includes superimposing the first laser pulses with the second laser pulses using a superposition unit to form superimposed laser pulses.