18770083. RESIST COMPOSITION AND METHOD OF FORMING PATTERN BY USING THE SAME (Samsung Electronics Co., Ltd.)
RESIST COMPOSITION AND METHOD OF FORMING PATTERN BY USING THE SAME
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RESIST COMPOSITION AND METHOD OF FORMING PATTERN BY USING THE SAME
This abstract first appeared for US patent application 18770083 titled 'RESIST COMPOSITION AND METHOD OF FORMING PATTERN BY USING THE SAME
Original Abstract Submitted
Provided are a resist composition and a method of forming a pattern by using the same, the resist composition including a polymer including a first repeating unit represented by Formula 1, a photoacid generator, and an organic solvent:
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