18980249. AIRBORNE CONTAMINANT MANAGEMENT METHOD AND SYSTEM (Taiwan Semiconductor Manufacturing Co., Ltd.)

AIRBORNE CONTAMINANT MANAGEMENT METHOD AND SYSTEM

Organization Name

Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor(s)

Chih-Ming Tsao of Hsinchu TW

Tzu-Sou Chuang of Hsinchu TW

Chwen Yu of Hsinchu TW

AIRBORNE CONTAMINANT MANAGEMENT METHOD AND SYSTEM

This abstract first appeared for US patent application 18980249 titled 'AIRBORNE CONTAMINANT MANAGEMENT METHOD AND SYSTEM

Original Abstract Submitted

A method includes: generating a contaminant distribution map by sampling an environment of a cleanroom; selecting a first fabrication tool of the cleanroom by comparing the contaminant distribution map with at least one diffusion image in a first database; comparing parameters of the first fabrication tool against process utility information in a second database; and when the parameters are consistent with the process utility information, taking at least one action. The one action may include moving a cleaning tool to a location associated with a contaminant concentration of the contaminant distribution map; turning on a fan of the cleaning tool; stopping pod transit to the first fabrication tool; or halting production by the first fabrication tool.