18898606. METHOD OF PRODUCING SUBSTRATE (NICHIA CORPORATION)
METHOD OF PRODUCING SUBSTRATE
Organization Name
Inventor(s)
Norifumi Sasaoka of Tokushima-shi JP
Takashi Kawamata of Tokushima-shi JP
METHOD OF PRODUCING SUBSTRATE
This abstract first appeared for US patent application 18898606 titled 'METHOD OF PRODUCING SUBSTRATE
Original Abstract Submitted
A method of producing a substrate includes: providing a ceramic substrate having a first surface and a second surface that is located opposite the first surface; irradiating a first part of the first surface with a first laser light having a first pulse width to perform ablation of the first part of the ceramic substrate; and irradiating a second part of either the first surface or the second surface with a second laser light having a second pulse width, which is longer than the first pulse width, the second part being located apart from the first part in a plan view to perform thermal processing of a third part including the first part and the second part. Upon removal of the third part and a part enclosed by the third part, an aperture that extends from the first surface to the second surface is formed in the ceramic substrate.