CHEMICAL LIQUID PURIFICATION APPARATUS FOR SEMICONDUCTOR MANUFACTURING

Organization Name

samsung electronics co., ltd.

Inventor(s)

Hee Jeong Park of Suwon-si KR

Jihyun Kim of Seoul KR

Yunho Kim of Suwon-si KR

Sungjune Lee of Suwon-si KR

Donggyu Lee of Seoul KE

Dongryul Lee of Seoul KR

Sam-Jong Chol of Suwon-si KR

Kuk Nam Han of Suwon-si KR

CHEMICAL LIQUID PURIFICATION APPARATUS FOR SEMICONDUCTOR MANUFACTURING

This abstract first appeared for US patent application 20250105028 titled 'CHEMICAL LIQUID PURIFICATION APPARATUS FOR SEMICONDUCTOR MANUFACTURING

Original Abstract Submitted

provided is a chemical liquid purification apparatus for semiconductor manufacturing, the apparatus including a first tank configured to store a chemical liquid, the chemical liquid including impurities, a first line configured to supply the chemical liquid to the first tank, a first electrode and a second electrode included in the first tank, an alternating current waveform generator connected to the first electrode and the second electrode, a second line configured to supply the chemical liquid processed in the first tank to an outside of the first tank, and a filter configured to filter the impurities in the chemical liquid flowing in the second line.