18969335. NOZZLE HAVING REAL TIME INSPECTION FUNCTIONS (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.)

NOZZLE HAVING REAL TIME INSPECTION FUNCTIONS

Organization Name

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

Inventor(s)

KAI-LIN Chuang of CHIA-YI CITY TW

TSUNG-CHI Chen of TAICHUNG CITY TW

PEI-JUNG Chang of TAICHUNG CITY TW

CHUN-WEI Huang of TAICHUNG CITY TW

JUN XIU Liu of TAICHUNG CITY TW

NOZZLE HAVING REAL TIME INSPECTION FUNCTIONS

This abstract first appeared for US patent application 18969335 titled 'NOZZLE HAVING REAL TIME INSPECTION FUNCTIONS

Original Abstract Submitted

A semiconductor manufacturing system includes: a nozzle including a first channel that allows a fluid to flow through; a light source configured to emit light; and a light sensor configured to receive light, the light source and the light sensor being disposed within the first channel and opposite to each other. The semiconductor manufacturing system is configured to: emit light, by the light source, from within the nozzle toward a surface while the nozzle is dispensing the fluid; receive the light reflected from the surface by the light sensor, the emitted light and the reflected light adapted to be contained within the fluid; and examine a status of the reflected light. The emitted light and the reflected light propagate in a direction parallel to a longitudinal axis of the first channel.