Nec corporation (20250067601). BOLOMETER AND MANUFACTURING METHOD
BOLOMETER AND MANUFACTURING METHOD
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BOLOMETER AND MANUFACTURING METHOD
This abstract first appeared for US patent application 20250067601 titled 'BOLOMETER AND MANUFACTURING METHOD
Original Abstract Submitted
a bolometer includes a base material that has a stacking surface, two electrodes each of which has a main surface and a side surface extending from the main surface to the stacking surface, and a film that contains carbon nanotubes, in which the film includes a first portion that is stacked on the main surface, a second portion that is stacked on the stacking surface between the two electrodes, and a connection portion that connects the first portion and the second portion and provided on the side surface, and in which an average film thickness of the second portion is less than 10 nm.
