Samsung electronics co., ltd. (20250081429). SEMICONDUCTOR DEVICE
SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Daeyoung Moon of Suwon-si (KR)
Hyungjun Hwang of Suwon-si (KR)
SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20250081429 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
a semiconductor device includes a substrate, an active region defined by a device isolation layer within the substrate, a word line extending in a first horizontal direction within the substrate, a bit line extending on the substrate in a second horizontal direction intersecting with the first horizontal direction and including a metal-based conductive pattern, a first spacer on a sidewall of the metal-based conductive pattern, a second spacer on the first spacer, a direct contact in a direct contact hole exposing the active region and electrically connecting the bit line to the active region, and a buried spacer on a lower sidewall of the direct contact within the direct contact hole, wherein the second spacer contacts a sidewall of the direct contact on the sidewall of the direct contact.
