18256952. MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE simplified abstract (Robert Bosch GmbH)
Contents
- 1 MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Original Abstract Submitted
MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE
Organization Name
Inventor(s)
Ferenc Lukacs of Budapest (HU)
Raschid Baraki of Reutlingen (DE)
Sophielouise Mach of Reutlingen (DE)
Thomas Friedrich of Moessingen-Oeschingen (DE)
Volkmar Senz of Metzingen (DE)
MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 18256952 titled 'MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE
Simplified Explanation
The abstract of the patent application describes a micromechanical component that includes a substrate, a frame structure, at least one electrode, a pressure-sensitive membrane, and a sealed cavity. The self-supporting area of the membrane has local reinforcement structures to increase its thickness.
- The micromechanical component consists of a substrate, a frame structure, at least one electrode, a pressure-sensitive membrane, and a sealed cavity.
- The frame structure frames a partial surface of the substrate and/or an interlayer applied to the substrate.
- At least one electrode is mounted on the framed partial surface and/or interlayer.
- The pressure-sensitive membrane is subjected to external pressure, causing deformation.
- The self-supporting area of the membrane spans the framed partial surface and/or interlayer.
- The self-supporting area has at least one movable counterelectrode directed towards the framed partial surface and/or interlayer.
- The sealed cavity, surrounded by the membrane and frame structure, has a reference pressure.
- The self-supporting area of the membrane includes local reinforcement structures to increase its thickness in specific regions where the membrane thickness changes.
Potential Applications:
- Pressure sensors
- Microphones
- Accelerometers
- Force sensors
- Biomedical devices
Problems Solved:
- Provides a reliable and sensitive micromechanical component for measuring pressure or force.
- Enhances the structural integrity of the pressure-sensitive membrane in regions with varying thickness.
Benefits:
- Improved accuracy and sensitivity in pressure or force measurements.
- Increased durability and reliability of the micromechanical component.
- Enables miniaturization and integration of pressure-sensitive devices into various applications.
Original Abstract Submitted
A micromechanical component. The micromechanical component includes: a substrate; a frame structure which frames a partial surface of the substrate and/or an interlayer applied to the substrate, at least one electrode being mounted on the framed partial surface and/or interlayer; a pressure-sensitive membrane on which an external pressure acts and which brings about a deformation, wherein a self-supporting area of the membrane spans the framed partial surface and/or interlayer, the self-supporting area having at least one movable counterelectrode directed toward the framed partial surface and/or interlayer; and a sealed cavity having a reference pressure, surrounded by the membrane and the frame structure; wherein the self-supporting area of the membrane has local reinforcement structures for increasing a membrane thickness of the self-supporting area, the local reinforcement structures being mounted in particular regions of the self-supporting area where the membrane thickness of the self-supporting area changes.