18437119. SEMICONDUCTOR MANUFACTURING APPARATUS (Kabushiki Kaisha Toshiba)
SEMICONDUCTOR MANUFACTURING APPARATUS
Organization Name
Inventor(s)
Shun Hasebe of Nonoichi Ishikawa (JP)
SEMICONDUCTOR MANUFACTURING APPARATUS
This abstract first appeared for US patent application 18437119 titled 'SEMICONDUCTOR MANUFACTURING APPARATUS
Original Abstract Submitted
A semiconductor manufacturing apparatus according to the present embodiment includes a stage configured to support a semiconductor wafer. A probe card is positioned above the stage. A first electrode is formed of a conductive material, is movable on the stage from an outer side of the stage toward a center, and is contactable with a side surface of the semiconductor wafer.