18890006. TEMPLATE AND MANUFACTURING METHOD THEREOF (Kioxia Corporation)
TEMPLATE AND MANUFACTURING METHOD THEREOF
Organization Name
Inventor(s)
Takeharu Motokawa of Zushi Kanagawa (JP)
Noriko Sakurai of Yokohama Kanagawa (JP)
Hideaki Sakurai of Kawasaki Kanagawa (JP)
TEMPLATE AND MANUFACTURING METHOD THEREOF
This abstract first appeared for US patent application 18890006 titled 'TEMPLATE AND MANUFACTURING METHOD THEREOF
Original Abstract Submitted
A template according to an embodiment includes a substrate and a first layer. The substrate includes a first face having a pattern, and contains a first element. The first layer is in contact with the first face, and contains a compound having the first element and a second element different from the first element, the density of the compound in the first layer being higher than the density of the compound in the substrate.
