Samsung electronics co., ltd. (20240424457). GAS MIXING DEVICE, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME

GAS MIXING DEVICE, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME

Organization Name

samsung electronics co., ltd.

Inventor(s)

Hyunjoong Kim of Suwon-si (KR)

Sebin Choi of Suwon-si (KR)

Myeongjun Gil of Suwon-si (KR)

Sunghyup Kim of Suwon-si (KR)

Sunjoo Lee of Suwon-si (KR)

Cheol-Jae Lee of Suwon-si (KR)

Donghwy Chin of Suwon-si (KR)

Donghee Han of Suwon-si (KR)

GAS MIXING DEVICE, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME

This abstract first appeared for US patent application 20240424457 titled 'GAS MIXING DEVICE, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME

Original Abstract Submitted

a gas mixing device may include a main conduit and a gas transferring device connected to the main conduit. the gas transferring device may include a distribution device surrounding the main conduit, a supplying conduit connected to the distribution device and defining a supplying path, and a plurality of connection conduits connecting the first distribution device to the main conduit. the distribution device may include inner and outer cylinders, which are sequentially provided to surround the main conduit and are sequentially spaced apart from the main conduit in a radial direction. a distribution space may be defined between the inner and outer cylinders, and the supplying conduit may be coupled to the outer cylinder, such that the supplying path is connected to the distribution space. the connection conduits may be spaced apart from each other in a circumferential direction.