18741168. VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHOD OF PROCESSING (ASM IP Holding B.V.)
Contents
VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHOD OF PROCESSING
Organization Name
Inventor(s)
Theodorus Oosterlaken of Oudewater (NL)
Herbert Terhorst of Amersfoort (NL)
Bert Jongbloed of Oud-Heverlee (BE)
VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHOD OF PROCESSING
This abstract first appeared for US patent application 18741168 titled 'VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHOD OF PROCESSING
Original Abstract Submitted
A vertical furnace and a method for processing a plurality of substrates in said vertical furnace is disclosed. Embodiments of the presently described vertical furnace comprise a process chamber, a heating element configured to provide the heat to reach the desired process temperature for the processing of the plurality of substrates. The vertical furnace may further comprise heat distributing member for distributing the heat provided by the heating element. Embodiments of the presently described method comprise processing the plurality of substrates in a vertical furnace described herein.
