18740699. METHOD, SYSTEM, AND APPARATUS FOR DEPOSITION OF TRANSITION METAL FILM (ASM IP Holding B.V.)
Contents
METHOD, SYSTEM, AND APPARATUS FOR DEPOSITION OF TRANSITION METAL FILM
Organization Name
Inventor(s)
Venkata Surya Naga Raju Chava of Tempe AZ (US)
Estiaque Haidar Shourov of Mesa AZ (US)
Robert Brennan Milligan of Phoenix AZ (US)
Mojtaba Samiee of Tempe AZ (US)
Balaji Kannan of Phoenix AZ (US)
Rajkumar Jakkaraju of Phoenix AZ (US)
METHOD, SYSTEM, AND APPARATUS FOR DEPOSITION OF TRANSITION METAL FILM
This abstract first appeared for US patent application 18740699 titled 'METHOD, SYSTEM, AND APPARATUS FOR DEPOSITION OF TRANSITION METAL FILM
Original Abstract Submitted
Methods, system and apparatus for semiconductor processing including supporting a substrate comprising one or more oxide layers disposed on the substrate on a substrate support in a first reaction chamber, contacting a top surface of the one or more oxide layers of the substrate with an excited species, supporting the substrate in a second reaction chamber and depositing a transition metal layer over the top surface subsequent to contacting the top surface with the excited species.
- ASM IP Holding B.V.
- Venkata Surya Naga Raju Chava of Tempe AZ (US)
- Estiaque Haidar Shourov of Mesa AZ (US)
- Robert Brennan Milligan of Phoenix AZ (US)
- Mojtaba Samiee of Tempe AZ (US)
- Balaji Kannan of Phoenix AZ (US)
- Dong Li of Phoenix AZ (US)
- Rajkumar Jakkaraju of Phoenix AZ (US)
- H01L21/28
- C23C16/34
- C23C16/40
- C23C16/455
- C23C16/50
- H01J37/32
- H01L21/02
- CPC H01L21/28088
