18817577. ROTATING SUBSTRATE SUPPORT (ASM IP Holding B.V.)
Contents
ROTATING SUBSTRATE SUPPORT
Organization Name
Inventor(s)
ROTATING SUBSTRATE SUPPORT
This abstract first appeared for US patent application 18817577 titled 'ROTATING SUBSTRATE SUPPORT
Original Abstract Submitted
An apparatus for processing a substrate may comprise a reaction chamber, a substrate support disposed within the reaction chamber and provided with a support surface to support the substrate, and a motor to provide a rotary movement, wherein the motor is controlled and configured to create a bidirectional rotary movement between the reaction chamber and the substrate support around an axis perpendicular to the support surface.
