18706228. Process for the Pulsed Laser Ejection of Multiple Epitaxial Structures from one Thin Film Growth (The Board of Trustees of the Leland Stanford Junior University)
Contents
Process for the Pulsed Laser Ejection of Multiple Epitaxial Structures from one Thin Film Growth
Organization Name
The Board of Trustees of the Leland Stanford Junior University
Inventor(s)
Benjamin Reeves of Bellville TX (US)
Bruce M. Clemens of Stanford CA (US)
Process for the Pulsed Laser Ejection of Multiple Epitaxial Structures from one Thin Film Growth
This abstract first appeared for US patent application 18706228 titled 'Process for the Pulsed Laser Ejection of Multiple Epitaxial Structures from one Thin Film Growth
Original Abstract Submitted
We provide a technique that can rapidly and sequentially separate multiple sets of thin films from a wafer, effectively multiplying the number of epitaxial structures that may be recovered per wafer reuse, and therefore increasing throughput and reducing costs. A multilayer structure is formed of alternating epitaxial structures and sacrificial structures, with the entire stack disposed on a substrate structure. Then laser liftoff is performed one sacrificial structure at a time, to individually release the epitaxial structures from the substrate (and from each other).
