18701458. VALVE FOR SEMICONDUCTOR EQUIPMENT (LAM RESEARCH CORPORATION)
VALVE FOR SEMICONDUCTOR EQUIPMENT
Organization Name
Inventor(s)
John Michael Wiltse of Lake Oswego OR (US)
Brian Ratliff of Hillsboro OR (US)
VALVE FOR SEMICONDUCTOR EQUIPMENT
This abstract first appeared for US patent application 18701458 titled 'VALVE FOR SEMICONDUCTOR EQUIPMENT
Original Abstract Submitted
A valve comprising a valve body including an inlet, an outlet and a mounting surface. A first valve actuator is connected to the valve body. A plurality of mounting holes are formed in the mounting surface. The plurality of mounting holes are asymmetric relative to the mounting surface.
