18701429. MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD (LAM RESEARCH CORPORATION)
Contents
MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD
Organization Name
Inventor(s)
Kadthala R. Narendrnath of San Jose CA (US)
John B. Alexy of Wilsonville OR (US)
Rahul Rajeev of San Jose CA (US)
MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD
This abstract first appeared for US patent application 18701429 titled 'MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD
Original Abstract Submitted
A cooling plate for a showerhead in a substrate processing system includes a first portion that defines a first path through the cooling plate. The first portion includes a first inlet configured to receive flow of a first fluid and a first outlet in fluid communication with the first inlet. The first path is in fluid communication with the first inlet and the first outlet. The cooling plate includes a second portion that defines a second path through the cooling plate. The second portion comprises a second inlet configured to receive flow of a second fluid and a second outlet in fluid communication with the second inlet, the second path is in fluid communication with the second inlet and the second outlet, and the second path is not in fluid communication with the first path, the first inlet, and the first outlet.
