18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
Contents
PLASMA PROCESSING APPARATUS
Organization Name
Inventor(s)
Manabu Ishikawa of Miyagi (JP)
Takumi Imahashi of Miyagi (JP)
PLASMA PROCESSING APPARATUS
This abstract first appeared for US patent application 18741841 titled 'PLASMA PROCESSING APPARATUS
Original Abstract Submitted
A plasma processing apparatus includes a chamber, a bias power supply, a substrate support configured to support a substrate and an edge ring in the chamber, a plurality of first impedance adjusting mechanisms, and an electrical path. The substrate support includes a first region configured to support the substrate, a second region provided around the first region and configured to support the edge ring, a first bias electrode provided in the first region, a plurality of first impedance adjusting electrodes provided in the first region and grounded, and a second bias electrode provided in the second region. The plurality of first impedance adjusting mechanisms are configured to be respectively connected to the plurality of first impedance adjusting electrodes. The electrical path is configured to connect the bias power supply, the first bias electrode, and the second bias electrode.
